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For Microelectromechanical Systems (MEMS) and Nanoelectromechanical Systems (NEMS) production, each product requires a unique process technology. This book provides a comprehensive insight into the tools necessary for fabricating MEMS/NEMS and the process technologies applied. Besides, it describes enabling technologies which are necessary for a successful production, i.e., wafer planarization and bonding, as well as contamination control.
- Format: Pocket/Paperback
- ISBN: 9783662508268
- Språk: Engelska
- Antal sidor: 519
- Utgivningsdatum: 2016-10-06
- Förlag: Springer-Verlag Berlin and Heidelberg GmbH & Co. K