2389:-
Uppskattad leveranstid 7-11 arbetsdagar
Fri frakt för medlemmar vid köp för minst 249:-
For Microelectromechanical Systems (MEMS) and Nanoelectromechanical Systems (NEMS) production, each product requires a unique process technology. This book provides a comprehensive insight into the tools necessary for fabricating MEMS/NEMS and the process technologies applied. Besides, it describes enabling technologies which are necessary for a successful production, i.e., wafer planarization and bonding, as well as contamination control.
- Illustratör: 25 schwarz-weiße Tabellen 303 schwarz-weiße und 54 farbige Abbildungen Bibliographie
- Format: Inbunden
- ISBN: 9783662443941
- Språk: Engelska
- Antal sidor: 519
- Utgivningsdatum: 2015-01-20
- Förlag: Springer-Verlag Berlin and Heidelberg GmbH & Co. K