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Metal Impurities in Silicon- and Germanium-Based Technologies

Origin, Characterization, Control, and Device Impact

Häftad, Engelska, 2019

Av Cor Claeys, Eddy Simoen

2 399 kr

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This book provides a unique review of various aspects of metallic contamination in Si and Ge-based semiconductors. It discusses all of the important metals including their origin during crystal and/or device manufacturing, their fundamental properties, their characterization techniques and their impact on electrical devices’ performance. Several control and possible gettering approaches are addressed. The book offers a valuable reference guide for all researchers and engineers studying advanced and state-of-the-art micro- and nano-electronic semiconductor devices and circuits. Adopting an interdisciplinary approach, it combines perspectives from e.g. material science, defect engineering, device processing, defect and device characterization, and device physics and engineering.

Produktinformation

  • Utgivningsdatum2019-01-30
  • Mått155 x 235 x undefined mm
  • FormatHäftad
  • SpråkEngelska
  • SerieSpringer Series in Materials Science
  • Antal sidor438
  • FörlagSpringer Nature Switzerland AG
  • ISBN9783030067472