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This tutorial text covers lithography process control at several levels, from fundamental through advanced topics. A basic familiarity with lithography science is assumed. The book is intended to be a self contained tutorial that works as an introduction to those entering the field, and as a reference for the experienced lithography engineer.
- Format: Pocket/Paperback
- ISBN: 9780819430526
- Språk: Engelska
- Utgivningsdatum: 1999-05-31
- Förlag: SPIE Press