Simulation of Deposition Processes with PECVD Apparatus 1
bokomslag Simulation of Deposition Processes with PECVD Apparatus
Vetenskap & teknik

Simulation of Deposition Processes with PECVD Apparatus

Juergen Geiser • Meraa Arab

Inbunden

1719:-

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  • 2012
  • Författare: Juergen Geiser, Meraa Arab
  • Format: Inbunden
  • ISBN: 9781621003656
  • Språk: Engelska
  • Utgivningsdatum: 2012-01-01
  • Förlag: Nova Science Publishers Inc

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