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Designed for advanced undergraduate or first-year graduate courses in semiconductor or microelectronic fabrication, Fabrication Engineering at the Micro- and Nanoscale, Fourth Edition, covers the entire basic unit processes used to fabricate integrated circuits and other devices.
- Format: Pocket/Paperback
- ISBN: 9780199861224
- Språk: Engelska
- Antal sidor: 688
- Utgivningsdatum: 2012-12-20
- Förlag: OUP USA