Vetenskap & teknik
Pocket
Enabling Technology for MEMS and Nanodevices
Henry Baltes • Oliver Brand • Gary K Fedder • Christofer Hierold • Jan G Korvink
1029:-
Tillfälligt slut online – klicka på "Bevaka" för att få ett mejl så fort varan går att köpa igen.
Andra format:
- Inbunden 4759:-
This edition of 'CMOS-MEMS' was originally published in the successful series 'Advanced Micro & Nanosystems'. A close look at enabling technologies is taken, the first section on MEMS featuring an introduction to the challenges and benefi ts of three-dimensional silicon processing. An insider's view of industrial MEMS commercialization is followed by chapters on capacitive interfaces for MEMS, packaging issues of micro- and nanosystems, MEMS contributions to high frequency integrated resonators and filters, and the uses of MEMS in mass data storage and electrochemical imaging by means of scanning micro- and nanoprobes. The second section on nanodevices first tackles the emerging topic of nanofluidics with a contribution each on simulation tools and on devices and uses, followed by another two on nanosensors featuring CNT sensors and CMOS-based DNA sensor arrays, respectively.
- Illustratör: 15 schwarz-weiße Tabellen 245 schwarz-weiße Abbildungen
- Format: Pocket/Paperback
- ISBN: 9783527334988
- Språk: Engelska
- Antal sidor: 439
- Utgivningsdatum: 2013-04-17
- Förlag: Wiley-VCH Verlag GmbH