Defect Recognition and Image Processing in Semiconductors and Devices

This volume contains the proceedings of a conference devoted to furthering the understanding of defect inhomogeneities in semiconductors. The aim is to improve defect recognition so that structural inhomogeneities in both as-grown and processed semiconductors can be related to device performance. Emphasis was placed on mapping and microscopic observation before and after processing, to aid the understanding of defect generation, and the effect of defects on the reproducibility, reliability and yield of devices.